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As STT-MRAM development progresses and major companies see it as a potential replacement technology for DRAM and NAND, the characterization of STT-MRAM wafers becomes more and more critical.

While every STT-MRAM development center has its own experimental test setups consisting of various off the shelf instruments, ISI has developed the worldís first commercially available and fully integrated solution to address the needs of production level testing of STT-MRAM wafers.  This ISI tester includes proprietary magnets, pulse generator module, probecard interfaces, and measurement electronics that are all specifically developed by ISI to meet the needs of the STT-MRAM market.

Regarding ISIís proprietary magnet portfolio, with current STT-MRAM manufacturers migrating from in-plane MTJís to perpendicular MTJís ISI has developed an interchangeable test platform for both types of devices utilizing either ISIís Quad-Pole InPlane or Perpendicular Magnet configurations.  Both magnet configurations are designed to produce low remanent fields, high magnetic field strengths, and large uniformity across the MTJ device array under test.

ISIís proprietary pulse generator module is optimally matched with its proprietary probecard interface to produce programmable pulses as low as 5nS, with in-situ ability to perform measurements on the MTJs after pulsing.  The tester can be equipped with either the single or dual-channel pulse generator modules for improved UPH.  An optional RF probecard interface is also available for integration with external devices for RF engineering support.

The WLA-3000 Automated Wafer Level Analyzer can be integrated with a variety of industry standard Automated Wafer Probers to characterize magnetic properties of finished devices or test structures.  The Automated Wafer Probers can be ordered with a variety of customized features including low-noise chucks, environmental chambers, and hot-chuck applications.

Leveraging ISIís vast depth of magnetic testing development within the HDD industry, combined with a dedicated effort of working closely with the STT-MRAM industry leaders, ISIís WLA-3000 has been developed to address all the testing needs of MTJ devices.  ISI has shipped several of these testers which have now been qualified for high volume production testing of STT-MRAM devices.

The WLA-3000 offers the following turnkey portfolio of STT-MRAM tests:

  • I-V and R-V Curves

  • Breakdown Voltage

  • Transfer Curve with variable sweep rate

  • Switching Currents vs. Pulse Widths

  • Endurance Testing

  • Switching Probability vs. Applied Voltage

  • Low/High State R-V Distribution

  • Read Disturb

  • Error Rate Testing

  • Field Write Probability

  • Voltage Back Hopping

  • Sweeping Field Angle

Features:

  • High Field Strength Quad-Pole In-Plane or Perpendicular Magnet Configuration

  • Low Remnant Field

  • High Performance Electronics

  • Contacts grounded during probing

  • Programmable diode clamping levels
  • STT-RAM Specific Test Suite Module

  • Open architecture software allowing custom module design using VB6

  • Direct data output to various popular formats, including Microsoft Excelô  and CSV

  • Engineering/production modes

  • Intuitive user interface
  • Simple Vision System used for Probe monitoring
  • Supports either Electroglas or Accretech fully Automated 200mm and 300mm probers (not included)

  • 4-color Light Tower

  • Thermal Chuck

  • Dual Pulser

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Last modified: September 21, 2011